-40%
Zeiss LM100 large panel inspection station
$ 17160
- Description
- Size Guide
Description
Zeiss large panel inspection and CD (critical dimension measurement) tool with laser autofocusMerzhauser motorized stage with 550mm x 550mm (21.6"x21.6") XY travel
Reflected and transmitted light with Schott KL1500 fiber optic power supply and 12v/100w lamp house
Axiotron 2 microscope configured for brightfield, darkfield, and DIC inspection.
Motorized polarizer controlled from keypad
Motorized nosepiece rotation with Epifluor HD DIC objectives 5/10/20/50/100x and 5 Nomarski prisms
WIS8000 software