Mykrolis IntelliGen Mini Pump TelTrack Working For Wafer Coating Instrument

Description

Serial No : 11469 (2-4 RESIST 3)
Manufacturer
:
Mykrolis
System Specifications
- Dispense Performance
Dispense volume : 0.1~10.0 ml in 0.001 ml increments
Dispense rate : 0.1~3.0 ml/s in 0.001 ml/s increments
Dispense repeatability : <0.02 ml 3 sigma
Viscosity range ⓐ : 1~10 cP
Maximum dispense pressureⓑ : 0.20 Mpa (30 PSI)
- Reacharge Perfromance
Fill rate : 0.1~3.0 ml/s in 0.01 ml/s increments
Filtration rate : 0.1~3.0 ml/s in 0.001 ml/s increments
Vent rate : 0.1~3.0 ml/s in 0.01 ml/s increments
Vent frequency : 1 ~ 500 dispense cycles
Purge rate : 0.1~3.0 ml/s in 0.001 ml/s increments
- Mechanical
Wetted surfaces : Modufued PTFE, PTFE, Kalrez
Connection type : Insert style
Filterⓒ : Impact 8G, Impact 2 OF V2 filter, Impact mini OF filter
Inlet, outlet and vent tubing : 6.35 mm (0.25 in.) OD, 3.97 mm (0.15628 in.) ID
- Gas and Vacuum
Inlet gas type : Regulated N2
Inlet gas pressure : 0.26 to 0.28 Mpa (38 to 40 PSI)
Vacuum : -68 kPa (20 in. -Hg)
- Electrical
Current rating : 1.25 A
Input voltage (system) : 24 VDC ± 10 %
Power range : 22 ~ 26 V
Serial communication : RS-422 or RS-232 (slectable)
Parallel Communication : Triggers and Acknowledgments
Remark :
Note 1 : Depends on tool configuration, operation.
Contact applications support for detailed window of operation.
Note 2 : Maximum pressure is a limit on the Window of Operation.
Actual volumes and rates may be retracted to comply with the pressure limits
for a given viscosity, tubing diameter and tubing length.
Note 3 : The filter and interface are not included.
Note 4 :
In the IntelliGen®
Mini system, the fluid purge line is internally connected to the feed state and inlet.
Note 5 :
Do not over-tighten fittings.
Excessive force will damage the internal seals.
Tighten the fittings by hand then use a small adjustable wrench to tighten for the final 1/4 turn.
Dimensions :
Height - 208mm (8.2in.) x Width - 62mm (2.4 in.) x Depth - 217mm (8.5 in.)
AutomotiveAPro
AutomotiveAPro is expertly crafted.new and in perfect condition. and send in a package.
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As each computer monitor is different. colors may vary slightly from pictures.
We inspect each piece for quality prior to shipping and guarantee that you will be satisfied.
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Our Service
Communication : We will answer your questions within 48 hours(eBay message Only)
Delivery : After We received your payment. we will post your item in 24 hours if the stock available.
Sorry, we don't,ship item and answer your question on holiday & weekend
Payment
Payment by Paypal Only(NO accept any other payment).
Buyers must pay postage & handing costs.
Postage & handing costs are not refundable.
Shipment
We are based in South Korea. Shipment by international Air Mail from South Korea.
Note : See Shipping Condition
Delivery time
international Air Mail  : It normally take 10 - 15 business days for delivery ( up to 15 business days)
Note: Brazil, Egypt, Australia, France, Puerto Rico.. Some Countries buyer need extra Costs. Because EMS length limitation 105 cm
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