LAM Etcher 490/590

Description

The LAM Etcher is an early machine with the Generation two Controller drawer. It is complete with any upgrades and modifications added by the original owner.
This machine has been given a complete frame off cleanup and restoration. The Photos show various stages of the rebuild and the major components. As can be seen from the photos the following has been completed:
Main Chamber:
1. New Chamber, hard anodized
2. New Chamber bottom and exhaust ring, hard anodized
3. New lower Electrode assembly with focus ring style electrode (Boxed separately)
4. All Vacuum fixed and rotary O-rings and seals replaced
5. All Pneumatic tubing replaced as well as fittings if required.
6. All Pneumatic cylinders have been disassembled and rebuilt if they were rebuildable.
7. Upper electrode is process dependent and not supplied.
8. OEM-6 RF generator supplied
9. Throttle valve supplied
Load Locks:
1. All Vacuum fixed and rotary O-rings and seals replaced
2. All Pneumatic tubing replaced as well as fittings if required.
3. All Pneumatic cylinders have been disassembled and rebuilt if they were rebuildable.
4. Wafer arms and wafer guides are size dependent and not supplied.
Machine Mainframe:
1. All pneumatic tubing replaced.
2. Connectors and fittings replaced as needed.
3. Cables re-bundled and ty-wrapped
4. Frame repainted
5. All top panels re-anodized
6. Front and side panels supplied as is, in average condition but not refinished in any way.
7. Top plastic dust covers not supplied
8. Elevators are OEM (packed separately)
Gap Drive head and Automatch: (Packed separately)
1. Rebuilt by Aspect systems just prior to machine being crated from original owner.
2. Front display panel and operator interface has a newer CRT.
3. RF Power supply is not supplied nor are any external cables, gas lines, throttle valve, or vacuum fittings.
4. Electronics drawer has wiring replaced as needed, boards tested, connectors replaced as needed.
5. Factory manuals are included.
This machine will require some assembly to complete, test, leak check, and configure to your process and wafer size.
Machine is crated and ready for shipment. Priced for quick sale.
Shipping is FREE within China, All others are International and we ship By FedEx at our cost or you can arrange FedEx shipping from your end. Ocean Freight is also avaliable at significantly less cost but longer shipping time..
Please note that although we do our best to ensure your item is as described, we cannot open every package prior to shipment. If there is a problem, be sure to let us know and we will work it out to your satisfaction.
US Winner:
Winner must complete checkout and pay us within seven (7) days from the time the auction closes.
Payment must be received within seven (7) days of auction close. We reserve the right to re-list the item and file a Non-Paying Bidder alert if payment not received.
We accept US PayPal payments with confirmed address. Credit card payments are accepted through PayPal only.